Microfabrication of electroplated integrated chromium tips onto a silicon actuator

Electrodeposition has been claimed as an alternative and emerging technique devoted to the fabrication of tall microstructures. Various metals and alloys can be electroplated with micrometric dimensions and the lithography techniques allow the realizations of various patterns. We present a new process devoted to the microfabrication of a chromium tip from an electroplated microstructure. The aim of this work is the realization of a new scanning microscope to perform local thermal conductivity measurements of thin films.