Bi-directional movable latched micromechanism using one-directional movable Chevron electrothermal actuators for switch and relay applications

In this paper, we present a creative bi-directional movable latched micromechanism for switch and relay application. Bistable microelectromechanical (MEM) mechanisms provide two relative positions that are both mechanically stable. Preliminary results prove this new design is promising in optical switch application.