An integrated ASIC diagnosis system

The scanning electron microscope design analyzer (LSEM) is an integrated system consisting of a VLSI tester, an electron beam prober, and a modular design automation software. This system provides a user-friendly workstation environment for the complete analysis and debug of complex, submicron ASICs. LSEM has been successfully used to analyze the functional operation and internal timing of many complex designs. The software and hardware integration methods used in the LSEM system to improve VLSI diagnosis are described.<
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