A hybridised, multi-channel, charged-particle detecting and counting array

A hybrid circuit is reported which is a novel position-sensitive charged-particle detector. Multiple-anode integrated detectors (MAIDs) have been developed which consist of an array of electron sensing anodes and a corresponding array of amplifiers and counters all integrated on a single chip. The anodes are fabricated on the surface of the chip over a thick dielectric film. The active anode array can be arbitrarily extended by abutting individual MAIDs side-by-side, under the control of a customizing master ULA. When mounted with a microchannel plate multiplier, the device counts individual particles or photons.<
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