Silicon MEMS tunable capacitors operating in dielectric fluid

Theoretical and experimental results of a dielectric fluid application for electrostatic, micromachined tunable capacitors are presented. Tunable comb-drive based capacitors were tested and characterized in both air and transformer oil with a dielectric constant (/spl epsi//sub r/) of 2.29. In oil the capacitors exhibit a factor of /spl epsi//sub r/ increase in capacitance as well as tuning range. The dielectric fluid also provides significantly higher breakdown voltage and increased, tunable mechanical damping.