Dc- and un-SQUIDs for readout of ac-biased transition-edge sensors

We have developed a set of SQUIDs optimized for readout of ac-biased transition edge sensors. Junction shunts are made of Pd and attached to cooling fins to facilitate low-noise operation at sub-kelvin temperatures. SQUID's have a low loop inductance in order to reach a large natural dynamic range even without negative feedback. The SQUIDs are intended to be used for frequency-domain multiplexing of X-ray calorimeter arrays. Both traditional dc-SQUIDs and novel un-SQUIDs are manufactured. The fabrication process and SQUID design criteria are reviewed.