Voltage and frequency dependent dielectric properties of BST-0.5 thin films on alumina substrates

Dielectric properties of Ba/sub 0.5/Sr/sub 0.5/TiO/sub 3/ (BST-0.5) polycrystalline thin films, deposited on alumina substrates by means of reactive pulsed laser deposition (PLD), were measured at GHz frequencies using an interdigital capacitor (IDC). By applying a voltage up to 40 V between the two groups of fingers at room temperature, a high tunability of /spl sim/27% was achieved at 5 GHz. A relative dielectric constant of /spl sim/500 (consistent with the low-frequency IDC measurements) has been obtained using coplanar waveguides by means of the through-reflect-line (TRL) analysis combined with either a conformal mapping model or a full wave calculation. The BST loss tangent was estimated as /spl sim/0.05 in the range 3-16 GHz.