Prospects of the automation for ULSI manufacturing

The present condition of semiconductor wafer manufacturing line automation and future prospects are described. The wafer manufacturing line includes direct operations such as the setting of processing parameters for the equipment, the inspection of the products, and the transport of wafers between equipment. It also includes indirect operations such as production control, quality control, and equipment control which maintain the manufacturing line's operation. It is shown that these operations can be subject to automation. Automated processing, automated transport, and automated line control are considered.<
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