Characteristics of an Indium-Tin Oxide Transparent Conductor Deposited from Organometallic Compositions

The characteristics of an organometallic formulation are described that may be suitable for forming the transparent electrodes of liquid crystal and other displays directly by screen printing. When printed on glass and fired at approximately 550°C, a thin film of In
2-x
Sn
x
O
3-y
semiconducting oxide approximately 2500 Å thick is obtained. The sheet resistance of the In
2-x
Sn
x
O
3-y
film is about 1 k
\Omeg
/
\Box$^b$
, and its optical transmission in the visible range is greater than 95 percent.