Fabrication of TiNi shape memory alloy micro-structures and ceramic micro-mold by LIGA-MA-SPS process

Metals and ceramics are becoming increasing of importance to microsystem in reproduction and molding techniques because of the mechanical and physical properties. In the study, we have developed a new process using LIGA mold which is able to cast a microstructure of alloys or ceramics using spark plasma sintering (SPS) machine. In addition, the alloys are made by mechanical alloying (MA) method using a combination of different metal powder. A micro spring structure of Ti-Ni-Cu shape memory alloy powder was produced by way of trial. Finally, it was found that the LIGA-MA-SPS process is an effective technique.