Influence of Anisotropic Scattering Treatments in a Multi-Term Boltzmann Equation Solver

Anisotropic scattering is implemented in a multi-term Boltzmann equation solver (MultiBolt v3.1.0) for the modeling of electron-kinetic behavior considering both tabulated and analytic differential cross sections (DCSs). Collision terms for isotropic scattering, forward scattering, and screened-Coulomb scattering are presented and employed for elastic and inelastically scattered electrons as well as secondary electrons generated from ionization events. Swarm parameters (electron mobilities, velocities, reaction rates, and diffusion coefficients) are calculated and compared against experimental data to assess the influence of different scattering treatments on the macroscopic observable quantities. The assumption of isotropic and forward scattering models, as an approximation of the DCS more broadly, is evaluated for these conditions.