High-performance 1-Gb-NAND flash memory with 0.12-/spl mu/m technology

A 1.8-V, 1-Gb NAND flash memory is fabricated with 0.12-/spl mu/m CMOS STI process technology. For higher integration, a 32-cell NAND structure, which enables row decoder layout in one block pitch, is applied for the first time. Resulting cell and die sizes are 0.076 /spl mu/m/sup 2/ and 129.6 mm/sup 2/, respectively. A pseudo-4-phase charge pump circuit can generate up to 20 V even under the supply voltage of 1.6 V. A newly applied cache program function and expanded page size of (2 k + 64) byte lead to program throughput of 7 MB/s. The page copy-back function is provided for on-chip garbage collection. The read throughput of 27 MB/s is achieved by simply expanding I/O width and page size. A measured disturbance free-window of 3.5 V at 1.5 V-V/sub DD/ is obtained.