Geometric Parameterized Macromodel of Uniaxial Capacitance Accelerometer Based on Modal Superposition

The paper presents a piecewise geometric parameterization method and a parametric analysis of uniaxial capacitance accelerometer using a reduced model formulated on the modal superposition method. The extraction of parameters for the macromodel such as modal frequencies, modal masses, modal stiffnesses, strain energy, and capacitances are described. The reduced model consists of the two modes: torsion mode, and transversal mode, three electrodes in the electrostatic domain, and eight master nodes in the geometrical domain located at the edges of the plate. The generation of the discrete macromodels is executed using commercial software. The thickness of the plate has been selected as a design parameter. Linear piecewise interpolation is used for macromodel parameterization which have been done inside VHDL-AMS code. The accelerometer’s dynamic response simulated using of parametrized macromodel considering the mechanical contact phenomena and the nonlinear electrostatic interaction are presented and discussed. The developed approach can be applied for fast system level simulations in view of the variation of the geometric parameters.