Bulk micromachined 2D lens scanners for transparent optical fiber switches

As an alternative approach of constructing 3D MEMS optical crossconnectors; (OXC), we propose bulk micromachined electrostatic 2D lens-scanner arrays instead of tilting mirrors. Having carefully investigated the optical and mechanical designs of MEMS OXC, we have concluded that collimator lenses have the most significant influence upon the optomechanical switching performance.