Fast and accurate isothermal measurements on process-split wafers | IEEE Conference Publication | IEEE Xplore

Fast and accurate isothermal measurements on process-split wafers

Metadata

Published in: 2001 IEEE International Integrated Reliability Workshop. Final Report (Cat. No.01TH8580)

Date of Conference: 15-18 October 2001

Date Added to IEEE Xplore: 07 August 2002

Print ISBN:0-7803-7167-4

DOI: 10.1109/IRWS.2001.993925

Conference Location: Lake Tahoe, CA, USA

References is not available for this document.