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Effective-channel-length extraction for double-diffused MOSFETs | IEEE Conference Publication | IEEE Xplore

Effective-channel-length extraction for double-diffused MOSFETs


Abstract:

We propose a new method to extract the effective channel length for a double-diffused MOSFET (DMOSFET). This method models the DMOSFET by using two MOSFETs serially conne...Show More

Abstract:

We propose a new method to extract the effective channel length for a double-diffused MOSFET (DMOSFET). This method models the DMOSFET by using two MOSFETs serially connected to each other. The effective channel lengths for these two MOSFETs are extracted from the single relation between the effective channel length and the gate voltage. The effective channel lengths extracted by this method agree with the distance between the source and the drain fairly well.
Date of Conference: 19-22 March 2001
Date Added to IEEE Xplore: 07 August 2002
Print ISBN:0-7803-6511-9
Conference Location: Kobe, Japan

INTRODUCTION

The DMOSFET has been proposed and studied for realizing both short channel and high drain breakdown voltage at the same time [1], [2]. The channel impurity distribution of the DMOSFET is designed by double-diffusion process, which is made by diffusing both P and N type impurities from the source region. Because of this double-diffused region, however, it is very difficult to determine its effective channel length by the conventional extraction methods [3], [4], and thus developing a good device model for circuit design tools, like SPICE, is difficult. This fact is demonstrated by the dependency of the observed channel length on gate voltage , as mentioned later in Figs. 3 and 4. Early study modeled the DMOSFET by two MOSFET connected in series [5], [6]. In this study, the channel length was estimated to be the design channel length minus the lateral diffusion length of the impurity in the source and drain regions. The accuracy of such an estimation was enough for channel DMOSFET. It, however, is not enough for the present DMOSFET having less than channel.

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References

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