Modeling of New Spiral Inductor Based on Substrate Integrated Suspended Line Technology

This paper presents a new spiral inductor based on substrate integrated suspended line (SISL) technology. SISL is a new type of transmission line, which has many merits, such as low loss, low dispersion, and self-packaging. New series of spiral inductors based on this advanced SISL platform is proposed and modeled in this paper. SISL to microstrip transition is designed for the measurement of the SISL inductor, and an open-short deembedding method is introduced for the accurate extraction of inductor network parameters. A π equivalent circuit model is applied for modeling of the SISL inductor and new double-sided SISL (DSISL) inductor, and the accurate empirical expression of inductance L, peak quality factor Q
_max
, and self-resonance frequency are given. The typical relative error of each expression is less than 8%. Finally, a new DSISL inductor with patterned substrate is proposed, which can significantly improve the quality factor up to 40%. Simulation and measurement results show good agreement.