Test structure design for a fast and simple evaluation of carrier mobilities in highly injected regions | IEEE Conference Publication | IEEE Xplore

Test structure design for a fast and simple evaluation of carrier mobilities in highly injected regions


Abstract:

This paper describes the use and the design of a microelectronic test structure to show a new fast and simple DC method for measuring the dependence of carrier mobilities...Show More

Abstract:

This paper describes the use and the design of a microelectronic test structure to show a new fast and simple DC method for measuring the dependence of carrier mobilities upon carrier concentration. The test structure is designed for reducing parasitic effects and providing reliable results up to the highest carrier concentrations. Numerical simulation is used for verification of the accuracy of the method for several test structure parameters. Experimental results are provided and represented by a simple fitting formula.
Date of Conference: 15-18 March 1999
Date Added to IEEE Xplore: 06 August 2002
Print ISBN:0-7803-5270-X
Conference Location: Gothenburg, Sweden

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