In-line monitoring test structure for Charge-Based Capacitance Measurement (CBCM) with a start-stop self-pulsing circuit

CBCM measurements require known clock frequency. We proposed CBCM test structures with an internal start-stop self-pulsing circuit instead of external clock monitoring. The circuit creates 2¹³ pulses in a time-slot defined by SMU pulsed signal, resulting in known clock frequency. We accurately extract MOSFET's gate capacitances of several tens of fF.