Matching characteristics of metal resistors

This paper describes feasibility study on metal wiring resistors. Using 130nm technology node process, matching characteristics of metal wirings are discussed. It is found that precision of tungsten resistor fabricated by damascene process is as high as those of polycrystalline-silicon and polycrystalline-silicon with silicide resistors in the broad temperature. It is likely that tungsten can provide electrical, mechanical robust and highly reliable resistors.