A test vehicle and a two step procedure to evaluate a massive number of single-walled carbon nanotube field effect transistors

We present an automatic testing procedure to evaluate massive amounts of CNT-FETs that have been fabricated as a test vehicle. The procedure has been used to evaluate almost 140,000 CNT-FET devices that had been batch fabricated in a 4 inch wafer. The possibility of using data obtained from the automatic testing to achieve statistical analyses on device fabrication and on device electric characteristic is also analyzed.