Coupling on-wafer measurement errors and their impact on calibration and de-embedding up to 110 GHz for CMOS millimeter wave characterizations

An investigation of parasitic coupling that occurs when making on-wafer measurement at millimeter wave range is described. Several passive structures-dedicated to de-embedding of MOSFETs-are experimentally studied and compared to HFSS electromagnetic simulations in order to highlight parasitic coupling and identify causes of measurement errors. Suggestions on coupling between adjacent test structures and/or probe to back-end environment are also discussed.