Piezoresistive Gas Flow Sensors by Deep RIE Technology

In this paper, we fabricated drag force type gas flow sensor with dry etching technology which used deep RIE (reactive ion etching) and etching stop technology which used SOI (silicon-on-insulator). we fabricated two kinds of sensor, which are cantilever type and paddle type. Both cantilever and paddle type flow sensors have similar sensitivity as 0.03 mV/VldrkPa.