A moveable shielding box adaptable to commercial automatic wafer probers

A compact movable shielding box designed to be easily adapted to commercial automatic wafer probers is presented. This design allows the realization of automatic wafer mapping in a shielded area. It only covers the chuck and the prober area, avoiding the use of cumbersome Faraday boxes. Its design is explained, and the effective shielding capabilities are demonstrated by measuring subthreshold currents.<>