Abstract:
We report recent progress in the construction of a new aberration-corrected photoemission electron microscope. The correction element in this instrument is a hyperbolic e...Show MoreMetadata
Abstract:
We report recent progress in the construction of a new aberration-corrected photoemission electron microscope. The correction element in this instrument is a hyperbolic electron mirror, correcting for chromatic and spherical aberration. We present results from a numerical simulation combining a trajectory and wave-optical analysis, and we discuss the calculation of the modulation transfer function in this approach. First images on nano-structured metal and semiconductor surfaces have been obtained with the new instrument and are also presented.
Published in: 2006 Sixth IEEE Conference on Nanotechnology
Date of Conference: 17-20 July 2006
Date Added to IEEE Xplore: 30 October 2006
Print ISBN:1-4244-0077-5
Print ISSN: 1944-9399
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