-1/+0.8/spl deg/C error, accurate temperature sensor using 90nm 1V CMOS for on-line thermal monitoring of VLSI circuits

This paper proposes quite accurate four-transistor temperature sensor designed and developed for thermal testing and monitoring of VLSI circuits. The sensor is featured with an extremely small area of 11.6/spl times/4.1/spl mu/m/sup 2/ and low power consumption of about 25/spl mu/W. The performance of the sensor is highly linear and the predicted temperature error is merely -1.0/spl sim/+0.8/spl deg/C using two-point calibration within the range of 50/spl sim/125/spl deg/C. The sensor is implemented in ASPLA CMOS 90nm 1P6M process, operated at supply voltage of 1V, and tested successfully.