A new analytical inductance extraction technique of on-wafer spiral inductors

We derive a novel scalable self-inductance expression of interconnects connected to spiral inductors. With the use of the expression, the intrinsic inductance of spiral inductors can be extracted from measured results without any special fixtures. The accuracy of the proposed expression is proved by an electromagnetic simulator. In a comparison with the field solver, our calculated inductances match simulated results within 1.4%.