Ni-Zn-Co ferrite films prepared at 90/spl deg/C having /spl mu/''=30 at 3 GHz

Summary form only given. Soft ferrite films usable in 1-3 GHz range are highly required for wave absorbers for EMC measures currently. We found that Ni-Zn ferrite films prepared by spin spray ferrite plating at 90/spl deg/C exhibited high real and imaginary parts of permeability, /spl mu/' and /spl mu/'', of about 30 at 1 GHz and the resonance frequency was as high as 1.2 GHz. This f/sub r/ was much higher than that of 130 MHz expected for bulk Ni-Zn ferrite sample with the same values of /spl mu/'. In this study, the addition of Co ions improved the plated Ni-Zn ferrite films in /spl mu/', /spl mu/'' and/or f/sub r/.