MEMS for distributed wireless sensor networks

MEMS technology is enabling the development of inexpensive, autonomous wireless sensor nodes with volumes ranging from cubic mm to several cubic cm. These tiny sensor nodes can form rapidly deployed, massive distributed networks to allow unobtrusive, spatially dense, sensing and communication. MEMS enable these devices by reducing both the volume and energy consumption of various components. This paper reviews some of the wireless sensor nodes under development and applicable MEMS devices for small and efficient optical communication, micropower generation, and sensing. In addition, CMOS post-process micromachining is discussed as a method of achieving low cost and high integration.