Dielectric Barrier Discharge Plasma Deoxidation of Copper and Iron Surfaces

Removal of oxygen contaminations from metal surfaces during industrial fabrication processes is an important cleaning step mitigating the negative impact of native oxide layers on the performance of compounds. Therefore, the development of a method to effectively deoxidize metals without modifying the bulk morphology attracts considerable attention. Non-thermal hydrogen plasmas have been shown to be effective in the deoxidation of metal surfaces. Although a large number of studies have been focused on the development of low-pressure plasma techniques, there is the lack of information on the deoxidation effect of plasmas that operate in the atmospheric pressure range.