Investigation of Nanosecond Laser Ablation From Metal Targets

Laser ablation has been used extensively in various applications, including EUV lithography, laser induced breakdown spectroscopy, inertial confinement fusion, nanoparticle generation, and many others [1] . In each application, optimization of laser and plasma parameters is required in order to maximize various attributes such as conversion efficiency, line emission, nanoparticle generation, etc. However, optimization of these attributes requires a detailed understanding of the fundamental processes that occur during laser-material interaction and plasma expansion. In this study, a 6 ns Nd:YAG laser with intensities up to 1E12 W/cm 2 is used to investigate the ion and electron properties of a laser produced plasma. In particular, the evolution of the ion flux and kinetic energy are studied at various distances and angles away from the target using a Faraday cup. Different materials are used to determine the effects of material properties on the ions. Electron densities and temperatures are measured using various spectroscopy techniques at different times and distances away from the target in order to characterize the early stages of plasma expansion. Experimental results are then compared to models, and the accuracy of the models is discussed.