A Human Respiratory Monitoring Sensor Based on an AlN Resonant Microcantilever Coated with Graphene Oxide

This paper presents a human respiratory monitoring sensor based on an AlN resonant microcantilever coated with graphene oxide (GO). The sensor shows great performance in stability and repeatability. A closed-loop respiratory measurement system with fast response, and reliability is realized. The closed-loop system increases the sensor response time by more than 3 times. The whole system can provide real-time, ambulatory human respiratory monitoring. The sensor has advantages of small size and low cost for the low dependence on large peripherals, and can be integrated on a breathing mask to form a wearable sensing system.