Improved microwave cavity sensor for sheet resistance evaluation of conductive nano-films

This work presents an improved sheet resistance evaluation sensor for conductive nano-films. The proposed sensor is based on a microwave cylindrical cavity with an aperture on one of its endplates. Conductive nano-film is placed close to the aperture and thus perturbs the electromagnetic field inside the cavity. Measurement results show that the quality factor of the cavity can be related to the sheet resistance of nano-film. The advantage of the proposed sensor is that it is able to evaluate smaller samples. Namely, it has higher spatial resolution compared with conventional cavity sensor.