Frequency dependence of capacitance modeling in metal-insulator-metal capacitors

This paper presents the frequency dependence of capacitance in high-density barrier type anodic TiO
₂
metal-insulator-metal (MIM) capacitor. For a capacitance density of 30fF/μm
²
, it is found that increase in anodization voltage influences the capacitance variation with frequency because of change in crystalline and polarization properties of TiO
₂
. The defect profile is extracted and the polarization is studied using “Electrode polarization” model. The model and measurement results show that anodic TiO
₂
is a potential candidate for high quality MIM capacitors for applications with wide operation frequency range.