A novel technique for epitaxy tool-to-tool and chamber matching and optimization: ER: Equipment reliability and productivity enhancements

The financial success of a modern wafer fab depends on efficient use of process tools including maximizing utilization. A toolset that often provides a manufacturing limitation for the overall fab output is epitaxy due to the complexity of the process and the subtle impact of processing changes on final circuit performance. Rigorous matching of facilities and epitaxy (EPI) tool configuration enables recipe matching and the associated confidence in returning tools to production from invasive maintenance with minimal requalification. In addition, rollout of new recipes is facilitated by knowing all tools will perform equivalent to each other.