Development of high resolution and high shockproof MEMS accelerometer for monitoring of structures

We developed MEMS accelerometer which has high resolution, flat characteristic at low-frequency range, and high resistance to shock. Decreasing noise and making mass heavier improve a resolution performance which is 0.05gal. Additionally resistance to shock is 20000G to optimize stopper size. In this paper, we describe the improvement of low-frequency noise and flattening frequency characteristic.