A MEMS tunable photonic ring resonator with small footprint and large free spectral range

We demonstrate a MEMS tunable silicon photonic ring resonator with a 20 μm radius and a 5 nm free spectral range (FSR) for wavelength selection in reconfigurable optical networks. The device shows a loaded Q of 12000, and 300 pm tuning range at a wavelength of 1544 nm.