Fabrication of the solar-blind photodetector based on NixMg1−xO films by radio-frequency sputtering

Solar-blind photodetectors are fabricated with Ni
_x
Mg
_1-x
O films that are formed on MgO single crystal substrate using a simple RF sputtering technique and a Ni-Mg composite target. The optical bandgap increases from 3.61 to 3.95eV as the Ni concentration decreases from 1 to 0.52. Photoconductors with interdigitated electrodes are fabricated using the sputtered Ni
_x
Mg
_1-x
O films. The device based on Ni
_0.52
Mg
_0.48
O exhibits a peak response at a wavelength of 270nm with a cutoff wavelength of 295nm. The peak and the cutoff wavelengths of responsivity shift toward shorter wavelengths with decreasing Ni concentration.