Switching reliability and switching speed of barium strontium titanate (BST) BAW devices

Adaptive circuits are essential for the design of multi standard and reconfigurable radios. Ferroelectric thin film technology has demonstrated its advantages for the design of varactors and more recently, switchable and tunable bulk acoustic wave (BAW) resonators and filters. Some important performance characteristic of barium strontium titanate (BST) based resonators and filters have been well studied. However, their tuning and switching speed has not been well characterized yet. In this work, measurement results on the switching reliability as well as the switching speed of BST BAW resonators and filters are presented.