Electromechanical damping in MEMS accelerometers: A way towards single chip gyrometer accelerometer co-integration

This paper reports a method for controlling mechanical damping in MEMS devices. It consists in coupling a micro resonator to an electrical resistance that provides an additional damping source. Quality factor of individual MEMS can then be individually controlled. Quality factor tuning offers an efficient solution to solve the co-integration issue of accelerometer with gyrometer inside a same MEMS cavity under low pressure.