In-situ measurement of dielectric material properties: Perspectives for integrated digitally calibrated built-in-self-sensor solutions

In this paper, the possibilities for miniaturization of Non-Destructive dielectric measurement systems are proposed based on the concept of Digital-Calibration of integrated BISS (Built-In-Self-Sensor) using advanced SiGe:C technologies. Design, analysis and experimental verification of Built-in-Self-Test probing sensors are presented for characterization of integrated systems and material properties.