A Comparative Study for Designing SAW Gas Sensor using Different MEMS Piezoelectrical Materials based on COMSOL

A surface acoustic wave (SAW) gas sensor allows propagation of the wave through its surface piezoelectric materials. SAW devices are now frequently utilized. In a variety of fields due to their benefits characteristics such as a simple design, low cost, and superb performance, they may also be used in challenging environmental circumstances. The aim of this paper is to create a mass-sensitive transducer that works with metal oxide semiconductors to be integrated. An examination of the SAW gas sensor's materials, architecture design, and analysis of the SAW gas sensor are proposed in this paper. SAW devices were fabricated in commercial MEMS processes using piezoelectrical material such as Zinc oxide (ZnO), Tin Oxide (SnO
2
), and Barium titanate (BaTiO
3
) in the form of polycrystalline material. This paper represents a comparative study of a SAW gas sensor with two different designs of interdigitated transducers (IDT) using different piezoelectric materials as a substrate with a sensing layer based on COMSOL Multiphysics 5.5 software to maximize its output. The first design has the shape rectangular (IDT) while the second design has the shape of an ellipse.