Barium Titanate Electro-Optic Modulators for Silicon Photonics Grown by Off-Axis Sputtering

Barium titanate thin films with have been epitaxially integrated on silicon-on-insulator wafers. They exhibit excellent structural quality with effective Pockels coefficient >180 pm/V and intrinsic propagation loss <2 dB/cm. Hybrid waveguide modulators based on this material exhibit Vπ-length of 0.42 V-cm.