Comparative Analysis of Different Piezoelectric materials in Design of Microgrippers

Due to the growing demand and wide application of microdevices, there is an increase in the demand of microgrippers that can perfectly carry and place the microparts in MEMS Devices. In this paper, grippers are designed in micro dimensions for micro and nano devices. The piezoelectric actuation is used for analyses of designed precise microgrippers. Different piezoelectric materials such as PZT5A, PZT7, Barium Titanate, Barium Sodium Niobate, and Lithium Niobate are modelled and analysed in terms of displacement of arms with stress observation at the actuator ends. PZT5A proves the best material for microgripping effect. COMSOL Multiphysics is the FEA tool used for the design and analysis of microdevices.