FePt ordered alloy thin film prepared by 30 seconds annealing with Fe-O under-layer

An Fe-O underlayer formed by reactant sputtering with oxygen is applied as an under layer for c-axis orientation control of FePt ordered alloy thin film. The layered film is then annealed in vacuum by infrared lamp heater for 30 seconds. The magnetic properties and crystallographic structures of the film are studied by means of resonating sample magnetometer and X-ray diffractometer, respectively. It is found that the Fe-O underlayer induces high perpendicular anisotropy. From this result, it is considered that application of Fe-O underlayer and infrared annealing is a useful technique in producing FePt ordered alloy perpendicular magnetic recording media.