Design, test and qualification of stiction-free MEMS optical switches

This paper describes the design, test and qualification of MEMS optical switches developed at Umachines, Inc. The mirror monolithically integrated with MEMS actuator is driven by electromagnetic force and is perpendicular to light path during movement. Low voltage (< 1V) and low current (<10 mA) requirement of the MEMS actuators simplifies the control electronic circuits. Fully packaged 2/spl times/2 add/drop switches have passed rigorous Telcordia/sup /spl trade// GR-1221.