Fabrication of periodically-inverted GaAs for quasi-phase-matching nonlinear optical devices

A process developed for fabricating high-quality periodically-inverted GaAs waveguides based on sublattice reversal epitaxy and regrowth technique is presented. By using this process, we can fabricate low-loss GaAs wavelength conversion devices with /spl sim/ 6 /spl mu/m QPM periods.