Microphotonics devices based on silicon microfabrication technology

A silicon wire waveguide system based on the silicon-on-insulator (SOI) structure is promising for high-density integrated and high performance optical circuits. The Si/SiO/sub 2/ waveguide can achieve strong light confinement due to its high refractive-index contrast. In this paper, we describe our recent progress on microphotonics devices utilizing Si waveguide system.