Characteristics of extreme ultraviolet radiation from cryogenic rare gas targets

EUV emission due to interaction between the nano-second laser pulse and the rare gas cryogenic targets is characterized. Cryogenic xenon target yields the maximum EUV emission among other lighter rare gas targets. Spatially integrated conversion efficiency of 0.2% per pulse could be achieved. Angular distribution of the EUV emission and ionic debris reveals that the ionic debris has the angular distribution of cos/sup 6//spl theta/, which is much sharper than the EUV distribution of cos/sup 2//spl theta/.