Tunable bandpass filter using distributed MEMS transmission lines

This paper presents a two-state tunable RF MEMS bandpass filter operating at 16.5 and 22 GHz. The topology consists of coplanar waveguide sections that are periodically loaded with MEMS capacitors. The passband insertion loss and bandwidth are 2.3 dB and 11.5% at 16.5 GHz, and 3.3 dB and 16.5% at 22 GHz. The typical switching voltage is 45-50 V.